Summary
Ion beams are used in a variety of analytical techniques to assess both qualitative and quantitative information on elemental and chemical information as well as on depth distribution of elements in thin films. This part of the surface analysis block will cover the following techniques:
Topics
- SIMS (Secondary Ion Mass Spectrometry)
- TOFSIMS (Time-of-Flight Secondary Ion Mass Spectrometry)
- RBS (Rutherford Backscattering Spectrometry)
- ERDA (Elastic Recoil Detection Analysis)
- NRA (Nuclear Reaction Analysis)
Instructor
Jörg Patscheider
Senior Scientist R&D, Evatec AG, Trübbach, CH
