Summary
This module will provide an introduction to many commonly used characterization techniques. A variety of different methods of determining surface and interface composition and elemental distributions will be presented. A comparative evaluation of these analytical techniques in terms of sensitivity, depth resolution and spatial resolution will be discussed.
Topics
- Introduction
- SEM (Secondary Electron Microscopy), FIB (Focused Ion Beam), APT (Atom Probe Tomography)
- EDX and WDX (Energy Dispersive and Wavelength Dispersive X-ray Spectroscopy, XRF (X-ray Fluorescence Spectroscopy)
- AFM and other Scanning Probe Microscopy techniques
- Thickness measurement techniques
- Other analytical techniques presented in this short course program
Instructor
Jörg Patscheider
Senior Scientist R&D, Evatec AG, Trübbach, CH